4. Electric heating
  5. Metal heating
  6. By arc

Lee M. Loewenstein

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Dry development of photoresist

Adhesive bonding and miscellaneous chemical manufacture – Delaminating processes adapted for specified product – Delaminating in preparation for post processing recycling step
Patent

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Isolation structure and method

Semiconductor device manufacturing: process – Formation of electrically isolated lateral semiconductive... – Grooved and refilled with deposited dielectric material
Reexamination Certificate

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Isotropic nitride stripping

Adhesive bonding and miscellaneous chemical manufacture – Delaminating processes adapted for specified product – Delaminating in preparation for post processing recycling step
Patent

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Isotropic polysilicon plus nitride stripping

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
Patent

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Low particulate reliability enhanced remote microwave plasma dis

Electric heating – Metal heating – By arc
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Profile ID: LFUS-PAI-P-62218

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