Adhesive bonding and miscellaneous chemical manufacture – Delaminating processes adapted for specified product – Delaminating in preparation for post processing recycling step
Patent
1988-07-08
1989-11-21
Powell, William A.
Adhesive bonding and miscellaneous chemical manufacture
Delaminating processes adapted for specified product
Delaminating in preparation for post processing recycling step
156646, 156655, 156657, 1566591, 156628, 156662, 156668, 156904, 427 431, 430296, 430313, B44C 122, H01L 21306, C03C 1500, B29C 3700
Patent
active
048820083
ABSTRACT:
A process for developing a photolithographic pattern on the surface of an exposed workpiece in a process chamber; disposing the workpiece in a process chamber; heating the workpiece and introducing a silylating agent to the process chamber and to a face of the workpiece to be processed; generating activated species from a source of oxygen; and introducing the activated species to the face of the workpiece.
REFERENCES:
patent: 4751170 (1988-06-01), Mimura et al.
patent: 4782008 (1988-11-01), Babich et al.
Davis Cecil J.
Douglas Monte A.
Garza Cesar M.
Loewenstein Lee M.
Barndt B. Peter
Comfort James T.
Powell William A.
Sharp Melvin
Texas Instruments Incorporated
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