Low particulate reliability enhanced remote microwave plasma dis

Details Low particulate reliability enhanced remote microwave plasma dis Low particulate reliability enhanced remote microwave plasma dis

1991-03-29

1993-11-16

Paschall, Mark H.

Electric heating

Metal heating

By arc

2191214, 156646, 156345, 20429831, 20429836, B23K 900

Patent

active

052626105

ABSTRACT:
A remote microwave plasma generator comprises the combination of two parts, a tunable microwave applicator, and a double wall, water cooled quartz/sapphire tube. The tunable waveguide applicator is a nonconducting adjustable waveguide short with a quartz/sapphire tube inserted through it. The adjustable end is one quarter of a guide wavelength from the center line of the tube, and the other side is 0.1 inches less in distance, thus permitting the applicator to be used with a triple stub tuner for optimum coupling.

REFERENCES:
patent: 4004122 (1977-01-01), Hallier
patent: 4423303 (1983-12-01), Hirose et al.
patent: 4474625 (1984-10-01), Cohen et al.
patent: 4851630 (1989-07-01), Smith
patent: 4889965 (1989-12-01), Gervais et al.
patent: 4908492 (1990-03-01), Okamoto et al.

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