Apparatus for wafer level arc detection at an electrostatic...

Details Apparatus for wafer level arc detection at an electrostatic... Apparatus for wafer level arc detection at an electrostatic...

2007-08-15

2010-06-15

Dole, Timothy J (Department: 2831)

Electricity: measuring and testing

Fault detecting in electric circuits and of electric components

For fault location

C438S010000, C204S298030, C204S298080

Reexamination Certificate

active

07737702

ABSTRACT:
Wafer level arc detection is provided in a plasma reactor using an RF transient sensor sensing voltage at an electrostatic chucking electrode, the RF sensor being coupled to a threshold comparator, and a system controller responsive to the threshold comparator.

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