4. Active solid-state devices (e.g., transistors, solid-state diode
  5. Responsive to non-electrical signal
  6. Physical deformation

Lars Metzger

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Device for capacitive pressure measurement and method for...

Active solid-state devices (e.g. – transistors – solid-state diode – Responsive to non-electrical signal – Physical deformation
Reexamination Certificate

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Device for capacitive pressure measurement and method for...

Active solid-state devices (e.g. – transistors – solid-state diode – Responsive to non-electrical signal – Physical deformation
Reexamination Certificate

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Method for producing surface micromechanical structures, and...

Semiconductor device manufacturing: process – Making device or circuit responsive to nonelectrical signal – Physical stress responsive
Reexamination Certificate

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Method for the production of a micromechanical device,...

Etching a substrate: processes – Etching of semiconductor material to produce an article...
Reexamination Certificate

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Method of manufacturing a micromechanical component

Etching a substrate: processes – Etching of semiconductor material to produce an article...
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2383295

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