Device for capacitive pressure measurement and method for...

Active solid-state devices (e.g. – transistors – solid-state diode – Responsive to non-electrical signal – Physical deformation

Reexamination Certificate

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C257S254000, C257S414000

Reexamination Certificate

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07321156

ABSTRACT:
A device for manufacturing a capacitive pressure measurement includes an insulated base electrode, a mechanically deflectable counterelectrode composed of a layer made of at least one of a monocrystalline and polycrystalline semiconductor material, a contact arrangement for electrically connecting the electrodes, and at least one semiconductor component, all integrated onto a semiconductor substrate. The connection for the base electrode is formed by an electrically insulated conductive polycrystalline semiconductor layer. The method for manufactured the device includes the step of arranging a conductive polycrystalline semiconductor layer between two insulating layers on the semiconductor substrate for forming a base electrode.

REFERENCES:
patent: 5211058 (1993-05-01), Fukiura et al.
patent: 5277068 (1994-01-01), Fukiura et al.
patent: 2003/0215976 (2003-11-01), Chou et al.
patent: 2006/0014392 (2006-01-01), Benzel et al.

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