4. Semiconductor device manufacturing: process
  5. Chemical etching
  6. Vapor phase etching

Kyoung-hwan Yeo

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Gas mixture for etching a polysilicon electrode layer and etchin

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
Patent

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Method of fabricating a semiconductor device with multiple...

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – On insulating substrate or layer
Reexamination Certificate

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Methods of forming MOSFETS using crystalline sacrificial...

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – On insulating substrate or layer
Reexamination Certificate

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Semiconductor device employing buried insulating layer and...

Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Having insulated electrode
Reexamination Certificate

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Semiconductor device with multiple channels

Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Having insulated electrode
Reexamination Certificate

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Profile ID: LFUS-PAI-P-1401464

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