4. Semiconductor device manufacturing: process
  5. Chemical etching
  6. Vapor phase etching

King Wai Kelwin Ko

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Efficient in-situ resist strip process for heavy polymer metal e

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
Patent

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Method and system for etching tunnel oxide to reduce...

Semiconductor device manufacturing: process – Chemical etching – Having liquid and vapor etching steps
Reexamination Certificate

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Method and system for improving the topography of a memory...

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
Reexamination Certificate

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Method and system for processing a semiconductor device

Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Having insulated electrode
Reexamination Certificate

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Method and system for providing a robust alignment mark at...

Active solid-state devices (e.g. – transistors – solid-state diode – Alignment marks
Reexamination Certificate

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Profile ID: LFUS-PAI-P-1923358

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