Method and system for improving the topography of a memory...

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate

Reexamination Certificate

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C438S275000, C438S294000, C438S926000

Reexamination Certificate

active

10861575

ABSTRACT:
A method and system for improving the topography of a memory array is disclosed. In one embodiment, a dummy bitline is formed over a field oxide region at an interface between a memory array and interface circuitry. In addition, a poly-2 layer is applied above the dummy bitline on the field oxide region wherein the utilization of the field oxide region for placement of the dummy bitline provides a uniform surface between an actual bitline and the periphery of the memory array. Furthermore, a landing pad is formed at the end of the dummy bitline on the field oxide region, wherein the dummy bitline does not cause erroneous operation of the landing pad.

REFERENCES:
patent: 5789313 (1998-08-01), Lee
patent: 5946563 (1999-08-01), Uehara et al.
patent: 6717267 (2004-04-01), Kunikiyo
patent: 2002/0050655 (2002-05-01), Travis et al.
patent: 2003/0015742 (2003-01-01), Ogawa et al.

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