4. Radiant energy
  5. Inspection of solids or liquids by charged particles
  6. Electron probe type

Kenji Sugishima

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Adaptive real time control of a reticle/mask system

Automatic temperature and humidity regulation – Combined draft and check control
Reexamination Certificate

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Autonomous adaptive system and method for improving...

Data processing: artificial intelligence – Machine learning
Reexamination Certificate

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Built-in self test for a thermal processing system

Error detection/correction and fault detection/recovery – Pulse or data error handling – Digital logic testing
Reexamination Certificate

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Built-in self test for a thermal processing system

Data processing: measuring – calibrating – or testing – Measurement system – Performance or efficiency evaluation
Reexamination Certificate

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Electron beam exposure method and apparatus

Radiant energy – Means to align or position an object relative to a source or...
Patent

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Profile ID: LFUS-PAI-P-640812

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