Built-in self test for a thermal processing system

Details Built-in self test for a thermal processing system Built-in self test for a thermal processing system

2007-01-16

2007-01-16

Bui, Bryan (Department: 2863)

Data processing: measuring, calibrating, or testing

Measurement system

Performance or efficiency evaluation

C702S183000, C702S185000

Reexamination Certificate

active

11217230

ABSTRACT:
A method of monitoring a thermal processing system in real-time using a built-in self test (BIST) table that includes positioning a plurality of wafers in a processing chamber in the thermal processing system; executing a real-time dynamic model to generate a predicted dynamic process response for the processing chamber during the processing time; creating a first measured dynamic process response; determining a dynamic estimation error using a difference between the predicted dynamic process response and the measured dynamic process response; and comparing the dynamic estimation error to operational thresholds established by one or more rules in the BIST table.

REFERENCES:
patent: 6195621 (2001-02-01), Bottomfield
patent: 6351723 (2002-02-01), Maekawa
patent: 6803548 (2004-10-01), Wang et al.
patent: 2005/0252884 (2005-11-01), Lam et al.

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