Adaptive real time control of a reticle/mask system

Details Adaptive real time control of a reticle/mask system Adaptive real time control of a reticle/mask system

2006-04-11

2006-04-11

Norman, Marc (Department: 3744)

Automatic temperature and humidity regulation

Combined draft and check control

C700S121000, C118S050100, C118S725000, C219S483000, C716S030000

Reexamination Certificate

active

07025280

ABSTRACT:
An adaptive real time thermal processing system is presented that includes a multivariable controller. Generally, the method includes creating a dynamic model of the thermal processing system; incorporating reticle/mask curvature in the dynamic model; coupling a diffusion-amplification model into the dynamic thermal model; creating a multivariable controller; parameterizing the nominal setpoints into a vector of intelligent setpoints; creating a process sensitivity matrix; creating intelligent setpoints using an efficient optimization method and process data; and establishing recipes that select appropriate models and setpoints during run-time.

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