4. Coating apparatus
  5. Gas or vapor deposition
  6. With treating means

Kazuhiro Tomioka

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Fence-free etching of iridium barrier having a steep taper...

Semiconductor device manufacturing: process – Having magnetic or ferroelectric component
Reexamination Certificate

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Hardmask with high selectivity for Ir barriers for...

Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Having insulated electrode
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Method for manufacturing semiconductor device

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Method of manufacturing semiconductor device

Adhesive bonding and miscellaneous chemical manufacture – Delaminating processes adapted for specified product – Delaminating in preparation for post processing recycling step
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Method of manufacturing semiconductor device

Adhesive bonding and miscellaneous chemical manufacture – Delaminating processes adapted for specified product – Delaminating in preparation for post processing recycling step
Patent

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Profile ID: LFUS-PAI-P-903946

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