Chemistry: electrical and wave energy
Apparatus
Coating, forming or etching by sputtering
Inventor
active
A1 alloy thin film for semiconductor device electrode and...
A1-N1-Y alloy films for electrodes of semiconductor devices and
Ag base alloy thin film and sputtering target for forming Ag...
Ag base alloy thin film and sputtering target for forming Ag...
Aluminum alloy electrode for semiconductor devices
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