Ag base alloy thin film and sputtering target for forming Ag...

Details Ag base alloy thin film and sputtering target for forming Ag... Ag base alloy thin film and sputtering target for forming Ag...

2005-12-22

2008-09-02

Mulvaney, Elizabeth (Department: 1794)

Stock material or miscellaneous articles

Circular sheet or circular blank

C428S064400, C430S270120

Reexamination Certificate

active

07419711

ABSTRACT:
The present invention relates to an Ag alloy film. Particularly, it is preferably used as a reflective film or semi-transmissive reflective film for an optical information recording medium having high thermal conductivity/high reflectance/high durability in the field of optical information recording media, an electromagnetic-shielding film excellent in Ag aggregation resistance, and an optical reflective film on the back of a reflection type liquid crystal display device, or the like. The Ag alloy film of the present invention comprises an Ag base alloy containing Bi and/or Sb in a total amount of 0.005 to 10% (in terms of at %). Further, the present invention relates to a sputtering target used for the deposition of such an Ag alloy film.

REFERENCES:
patent: 4743526 (1988-05-01), Ando et al.
patent: 4998239 (1991-03-01), Strandjord et al.
patent: 5948497 (1999-09-01), Hatwar et al.
patent: 5989669 (1999-11-01), Usami
patent: 6007889 (1999-12-01), Nee
patent: 6280811 (2001-08-01), Nee
patent: 6351446 (2002-02-01), Weinzerl et al.
patent: 6451402 (2002-09-01), Nee
patent: 6544616 (2003-04-01), Nee
patent: 6689444 (2004-02-01), Nakai et al.
patent: 6790503 (2004-09-01), Nee
patent: 6852384 (2005-02-01), Nee
patent: 7022384 (2006-04-01), Fujii et al.
patent: 7203003 (2007-04-01), Nakai et al.
patent: 2002/0012604 (2002-01-01), Aratani et al.
patent: 2002/0034603 (2002-03-01), Nee
patent: 2004/0028912 (2004-02-01), Tauchi et al.
patent: 2004/0258872 (2004-12-01), Nee
patent: 2005/0015362 (2005-01-01), Ostertag et al.
patent: 2005/0018583 (2005-01-01), Worthington et al.
patent: 2005/0238839 (2005-10-01), Takagi et al.
patent: 2005/0287333 (2005-12-01), Takagi et al.
patent: 2006/0013988 (2006-01-01), Tauchi et al.
patent: 2006/0104853 (2006-05-01), Tauchi et al.
patent: 2006/0234001 (2006-10-01), Tauchi et al.
patent: 1248044 (1998-09-01), None
patent: 0 594 516 (1994-04-01), None
patent: 1 152 405 (2001-11-01), None
patent: 52-013688 (1977-02-01), None
patent: 58-130237 (1983-08-01), None
patent: 04-28032 (1992-01-01), None
patent: 04-38737 (1992-02-01), None
patent: 04-252440 (1992-09-01), None
patent: 06-302027 (1994-10-01), None
patent: 07-134300 (1995-05-01), None
patent: 07-315874 (1995-12-01), None
patent: 08-293379 (1996-11-01), None
patent: 09-135096 (1997-05-01), None
patent: 09-230806 (1997-09-01), None
patent: 11-231122 (1999-08-01), None
patent: 2000-57627 (2000-02-01), None
patent: 2001-126315 (2001-05-01), None
patent: 2001-184725 (2001-07-01), None
patent: 2002-15464 (2002-01-01), None
patent: 2002-92959 (2002-03-01), None
patent: 2002-237097 (2002-08-01), None
patent: 2002-332568 (2002-11-01), None
patent: 8301156 (1983-06-01), None
patent: WO 02/07919 (2002-01-01), None
U.S. Appl. No. 11/353,168, filed Feb. 14, 2006, Tauchi et al.
U.S. Appl. No. 11/313,815, filed Dec. 22, 2005, Tauchi et al.
U.S. Appl. No. 11/375,036, filed Mar. 15, 2006, Tauchi et al.
U.S. Appl. No. 11/395,227, filed Apr. 3, 2006, Tauchi et al.
U.S. Appl. No. 11/401,853, filed Apr. 12, 2006, Tauchi et al.
U.S. Appl. No. 11/428,045, filed Jun. 30, 2006, Fujii et al.
U.S. Appl. No. 11/425,062, filed Jun. 19, 2006, Tauchi et al.
U.S. Appl. No. 11/425,068, filed Jun. 19, 2006, Nakai et al.
U.S. Appl. No. 11/612,791, filed Dec. 19, 2006, Nakano et al.
Applicant's Amendment filed on Jul. 31, 2006, in U.S. Appl. No. 10/633,550.
Office Action issued on Oct. 19, 2006, in U.S. Appl. No. 10/633,550.
Request for Continued Examination along with Amendment filed Jan. 29, 2007, in U.S. Appl. No. 10/633,550.
Office Action issued on Apr. 19, 2007, in U.S. Appl. No. 10/633,550.
Applicant's Amendment filed on May 18, 2007, in U.S. Appl. No. 10/633,550.
Office Action issued Aug. 7, 2007, in U.S. Appl. No. 10/633,550.
U.S. Appl. No. 12/100,823, filed Apr. 10, 2008, Tauchi et al.

Affiliated with

Also associated with

Rating

Ag base alloy thin film and sputtering target for forming Ag... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Ag base alloy thin film and sputtering target for forming Ag..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Ag base alloy thin film and sputtering target for forming Ag... will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3982098