Ag base alloy thin film and sputtering target for forming Ag...

Details Ag base alloy thin film and sputtering target for forming Ag... Ag base alloy thin film and sputtering target for forming Ag...

2011-01-18

2011-01-18

Mulvaney, Elizabeth (Department: 1785)

Stock material or miscellaneous articles

Circular sheet or circular blank

C428S064400, C430S270120

Reexamination Certificate

active

07871686

ABSTRACT:
The present invention relates to an Ag alloy film. Particularly, it is preferably used as a reflective film or semi-transmissive reflective film for an optical information recording medium having high thermal conductivity/high reflectance/high durability in the field of optical information recording media, an electromagnetic-shielding film excellent in Ag aggregation resistance, and an optical reflective film on the back of a reflection type liquid crystal display device, or the like. The Ag alloy film of the present invention comprises an Ag base alloy containing Bi and/or Sb in a total amount of 0.005 to 10% (in terms of at %). Further, the present invention relates to a sputtering target used for the deposition of such an Ag alloy film.

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