4. Semiconductor device manufacturing: process
  5. Introduction of conductivity modifying dopant into...
  6. Ion implantation of dopant into semiconductor region

Junichi Koezuka

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Doping apparatus, doping method, and method for fabricating...

Coating apparatus – With indicating – testing – inspecting – or measuring means
Reexamination Certificate

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Doping method and method for fabricating thin film transistor

Semiconductor device manufacturing: process – With measuring or testing
Reexamination Certificate

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Doping method and method of manufacturing field effect...

Semiconductor device manufacturing: process – Introduction of conductivity modifying dopant into... – Ion implantation of dopant into semiconductor region
Reexamination Certificate

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Ion implantation method and method for manufacturing...

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
Reexamination Certificate

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Ion implantation method and method for manufacturing...

Semiconductor device manufacturing: process – Introduction of conductivity modifying dopant into... – Ion implantation of dopant into semiconductor region
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2166860

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