4. Electricity: magnetically operated switches, magnets, and electr
  5. Magnets and electromagnets
  6. Magnet structure or material

Jun-ichi Arami

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Ceramic electrostatic chuck with built-in heater

Electric heating – Heating devices – Combined with container – enclosure – or support for material...
Patent

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Ceramic electrostatic chuck with built-in heater

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
Patent

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Electrostatic chuck and plasma apparatus equipped therewith

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
Patent

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Electrostatic chuck having a multilayer structure for attracting

Electric heating – Metal heating – By arc
Patent

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Heat treatment apparatus

Coating apparatus – Gas or vapor deposition – With treating means
Reexamination Certificate

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Profile ID: LFUS-PAI-P-330833

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