Ceramic electrostatic chuck with built-in heater

Details Ceramic electrostatic chuck with built-in heater Ceramic electrostatic chuck with built-in heater

1994-12-27

1997-09-09

Walberg, Teresa J.

Electric heating

Heating devices

Combined with container, enclosure, or support for material...

219544, 361233, H05B 368, H05B 344

Patent

active

056652607

ABSTRACT:
A ceramic electrostatic chuck with a built-in heater having electrodes of an electroconductive ceramic bonded to a surface of a supporting substrate of an electrically conducting ceramic. A heat generating layer of an electroconductive ceramic is bonded to the other surface of the supporting substrate and a covering layer of an electrically insulating ceramic is provided thereon. Each of the supporting substrate, electrode for the electrostatic chuck and heat generating layer has a surface roughness Rmax of 5 .mu.m or larger.

REFERENCES:
patent: 4900396 (1990-02-01), Hayashi
patent: 5155652 (1992-10-01), Logan
patent: 5166856 (1992-11-01), Liporace et al.
patent: 5328761 (1994-07-01), Omori
patent: 5343022 (1994-08-01), Gilbert
patent: 5384682 (1995-01-01), Watanabe

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