Coating processes
Coating by vapor, gas, or smoke
Examiner
active
No affiliations
Atomic composition controlled ruthenium alloy film formed by...
Atomic layer deposition (ALD) method and reactor for...
Atomic layer deposition of copper using surface-activation...
Atomic layer deposition of tantalum-containing films using...
Chemical vapor deposition chamber with dual frequency bias...
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Profile ID: LFUS-PAI-P-2170368