Coating processes – Coating by vapor – gas – or smoke
Reexamination Certificate
2006-11-29
2010-02-09
Meeks, Timothy H (Department: 1792)
Coating processes
Coating by vapor, gas, or smoke
Reexamination Certificate
active
07658969
ABSTRACT:
A method and apparatus for process integration in manufacture of a ask are disclosed. In one embodiment, a cluster tool suitable for process integration in manufacture of a photomask including a vacuum transfer chamber having coupled thereto at least one hard mask deposition chamber and at least one plasma chamber configured for etching chromium. In another embodiment, a method for process integration in manufacture of a photomask includes depositing a hard mask on a substrate in a first processing chamber, depositing a resist layer on the substrate, patterning the resist layer, etching the hard mask through apertures formed in the patterned resist layer in a second chamber; and etching a chromium layer through apertures formed in the hard mask in a third chamber.
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Grewal Virinder
Kumar Ajay
Yau Wai-Fan
Applied Materials Inc.
Meeks Timothy H
Miller, Jr. Joseph
Patterson & Sheridan LLP
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