Semiconductor device manufacturing: process
Coating with electrically or thermally conductive material
To form ohmic contact to semiconductive material
Inventor
active
Copper interconnect wiring and method of forming thereof
CVD of integrated Ta and TaNx films from tantalum halide...
CVD of tantalum and tantalum nitride films from tantalum...
Formation of doped regions and/or ultra-shallow junctions in...
Formation of ultra-shallow junctions by gas-cluster ion...
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