Coating processes
Electrical product produced
Integrated circuit, printed circuit, or circuit board
Inventor
active
Apparatus for preventing deposition gases from contacting a sele
CVD of silicon oxide using TEOS decomposition and in-situ planar
Method for protecting against deposition on a selected region of
Plasma-enhanced CVD process using TEOS for depositing silicon ox
Process for PECVD of silicon oxide using TEOS decomposition
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Profile ID: LFUS-PAI-P-285289