4. Semiconductor device manufacturing: process
  5. Making passive device
  6. Resistor

Jia Zhen Zheng

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Apparatus and method for planarization of spin-on materials

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Utilizing reflow
Patent

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Apparatus and method for planarization of spin-on materials

Coating apparatus – With means to centrifuge work
Reexamination Certificate

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Barrier layer

Active solid-state devices (e.g. – transistors – solid-state diode – Combined with electrical contact or lead – Of specified material other than unalloyed aluminum
Patent

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Copper interconnect with top barrier layer

Active solid-state devices (e.g. – transistors – solid-state diode – Combined with electrical contact or lead – Of specified material other than unalloyed aluminum
Reexamination Certificate

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Damascene process for forming coplanar top surface of copper con

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Patent

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Profile ID: LFUS-PAI-P-359726

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