4. Semiconductor device manufacturing: process
  5. Chemical etching
  6. Combined with coating step

Ji Soo Kim

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Etch with striation control

Semiconductor device manufacturing: process – Chemical etching – Combined with coating step
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Glue layer for hydrofluorocarbon etch

Semiconductor device manufacturing: process – Chemical etching – Combined with coating step
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Infinitely selective photoresist mask etch

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Magnetic enhancement for mechanical confinement of plasma

Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – Having glow discharge electrode gas energizing means
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Magnetic enhancement for mechanical confinement of plasma

Coating processes – Direct application of electrical – magnetic – wave – or... – Plasma
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Profile ID: LFUS-PAI-P-2296258

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