4. Semiconductor device manufacturing: process
  5. Chemical etching
  6. Having liquid and vapor etching steps

Jeffrey P. Erhardt

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Characterizing distribution signatures in integrated circuit...

Data processing: measuring – calibrating – or testing – Testing system – Of circuit
Reexamination Certificate

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Determination of nonphotolithographic wafer process-splits...

Semiconductor device manufacturing: process – With measuring or testing
Reexamination Certificate

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In-line voltage contrast determination of tunnel oxide...

Semiconductor device manufacturing: process – With measuring or testing – Electrical characteristic sensed
Reexamination Certificate

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Method and apparatus for correlating semiconductor process...

Data processing: measuring – calibrating – or testing – Measurement system in a specific environment – Quality evaluation
Reexamination Certificate

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Method and apparatus for using clustering method to analyze...

Data processing: measuring – calibrating – or testing – Measurement system – Measured signal processing
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Profile ID: LFUS-PAI-P-2546754

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