Data processing: measuring – calibrating – or testing – Measurement system in a specific environment – Quality evaluation
Reexamination Certificate
2007-08-28
2007-08-28
McElheny, Jr., Donald E. (Department: 2863)
Data processing: measuring, calibrating, or testing
Measurement system in a specific environment
Quality evaluation
C382S145000
Reexamination Certificate
active
10973181
ABSTRACT:
A method for correlating semiconductor process data analyzes a semiconductor device that has been treated by a process, to produce process data related to the process. The data is converted into an image pattern, and automatic image retrieval is used to identify other devices having similar images. The process data is then correlated with prior process data of the other devices having the similar images.
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Erhardt Jeffrey P.
Shetty Shivananda S.
Steffan Paul J.
Advanced Micro Devices , Inc.
Ishimaru Mikio
Le Toan M.
McElheny Jr. Donald E.
Zahrt, II William D.
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