4. Semiconductor device manufacturing: process
  5. Chemical etching
  6. Combined with coating step

Jeffrey Gambino

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Borderless contact etch process with sidewall spacer and selecti

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Patent

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Dual damascene interconnect structures having different...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Reexamination Certificate

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Dual damascene interconnect structures having different...

Active solid-state devices (e.g. – transistors – solid-state diode – Combined with electrical contact or lead – Of specified material other than unalloyed aluminum
Reexamination Certificate

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High density selective SiO.sub.2 :Si.sub.3 N.sub.4 etching using

Semiconductor device manufacturing: process – Chemical etching – Combined with coating step
Patent

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Method for manufacturing fusible links in a semiconductor...

Semiconductor device manufacturing: process – Making device array and selectively interconnecting – Using structure alterable to nonconductive state
Reexamination Certificate

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Profile ID: LFUS-PAI-P-552458

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