4. Single-crystal, oriented-crystal, and epitaxy growth processes;
  5. Forming from vapor or gaseous state
  6. With decomposition of a precursor

Jackson H. Ho

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Flat-panel display semiconductor process for efficient...

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – On insulating substrate or layer
Reexamination Certificate

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Hillock-free multilayer metal lines for high performance thin fi

Stock material or miscellaneous articles – Structurally defined web or sheet – Including components having same physical characteristic in...
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Integrated driver electronics for MEMS device using high...

Optical: systems and elements – Optical modulator – Light wave temporal modulation
Reexamination Certificate

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Solid phase epitaxial crystallization of amorphous silicon films

Single-crystal – oriented-crystal – and epitaxy growth processes; – Forming from vapor or gaseous state – With decomposition of a precursor
Patent

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Solid phase epitaxial crystallization of amorphous silicon films

Stock material or miscellaneous articles – Composite – Of quartz or glass
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