Optical: systems and elements – Optical modulator – Light wave temporal modulation
Reexamination Certificate
2005-06-28
2005-06-28
Lester, Evelyn A. (Department: 2873)
Optical: systems and elements
Optical modulator
Light wave temporal modulation
C359S290000, C359S298000, C359S223100
Reexamination Certificate
active
06912082
ABSTRACT:
An apparatus integrating electrostatically actuated MEMS devices and high voltage driver (actuator) electronics on a single substrate, where the driver electronics utilize offset-gate high voltage thin-film transistors (HVTFTs) that facilitate the transmission of high actuating voltages using relatively low control voltages, thereby facilitating the formation of large arrays of electrostatically-actuated MEMS devices. The driver circuit is arranged such that the high actuating voltage is applied to an actuating electrode of the actuated MEMS device and drain electrode of the HVTFT when the HVTFT is turned off, thereby minimizing dielectric breakdown. When the HVTFT is turned on in response to the relatively low control voltage, the high actuating voltage is discharged to ground from the drain (offset) electrode to the source (not offset) electrode.
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Chow Eugene M.
Ho Jackson H.
Lu Jeng-Ping
Shih Chinnwen
Bever Patrick T.
Bever Hoffman & Harms LLP
Lester Evelyn A.
Palo Alto Research Center Incorporated
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