4. Etching a substrate: processes
  5. Etching and coating occur in the same processing chamber

Hongwen Yan

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Advanced high-k gate stack patterning and structure...

Semiconductor device manufacturing: process – Chemical etching – Having liquid and vapor etching steps
Reexamination Certificate

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Apparatus and method for shielding a wafer from charged...

Etching a substrate: processes – Etching and coating occur in the same processing chamber
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Direct contact between high-κ/metal gate and wiring...

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
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Etch selectivity enhancement for tunable etch resistant...

Single-crystal – oriented-crystal – and epitaxy growth processes; – Forming from vapor or gaseous state – With decomposition of a precursor
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Fabrication of notched gates by passivating partially etched...

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
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Profile ID: LFUS-PAI-P-2072246

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