4. Etching a substrate: processes
  5. Etching and coating occur in the same processing chamber
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Bennett Delores A.

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Chakravarthy Pramod

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Chang Kuang-Hui

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Chen Arthur Y.

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Chu Po-Tao

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Fukawa Yuko

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Hunt Robin

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International Business Machines Corporation Inc.

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Ketchum Jeffrey M.

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Kota Gowri

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Kuo Ming-Hsun

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Majahad Anthony M.

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Mui David S. L.

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Muroski, Jr. Kenneth J.

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Nagras Atul

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Norum James P.

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Sadayama Shoji

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Shepherd Nicholas

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Stoffel Wolmar J.

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Sun Zhi-Wen

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