4. Radiant energy
  5. Inspection of solids or liquids by charged particles
  6. Methods

Hitachi Instrument Engineering Co., Ltd.

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Automatic preliminary irradiation apparatus in transmission elec

Radiant energy – Inspection of solids or liquids by charged particles – Electron microscope type
Patent

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Cell analysis apparatus

Chemistry: analytical and immunological testing – Automated chemical analysis – Utilizing a centrifuge or compartmented rotor
Patent

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Charged particle beam exposure apparatus

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
Patent

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Charged particle beam exposure apparatus

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
Patent

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Composite apparatus with secondary ion mass spectrometry instrum

Radiant energy – Inspection of solids or liquids by charged particles – Positive ion probe or microscope type
Patent

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Profile ID: LFUS-PAI-P-57846

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