Charged particle beam exposure apparatus

Details Charged particle beam exposure apparatus Charged particle beam exposure apparatus

1991-09-20

1994-01-25

Berman, Jack I.

Radiant energy

Irradiation of objects or material

Irradiation of semiconductor devices

H01J 37302

Patent

active

052818276

ABSTRACT:
A column section is disposed within a thermostatic chamber within a clean room, a section for analog controlling each portion of the column section is disposed within the clean room and outside of the thermostatic chamber, and a section for digital controlling the analog control section is disposed outside of the clean room.

REFERENCES:
patent: 4261762 (1981-04-01), King
patent: 4985634 (1991-01-01), Stengl et al.
Chang et al., Electronics, vol. 50, No. 10, May 12, 1977, pp. 89-96.

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