4. Coating apparatus
  5. Gas or vapor deposition
  6. With treating means

Hisashi Tsukazaki

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Apparatus for and method of forming thin film

Coating processes – Direct application of electrical – magnetic – wave – or... – Ion plating or implantation
Patent

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Cluster beam thin film deposition apparatus with thermionic elec

Coating apparatus – Gas or vapor deposition – With treating means
Patent

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Evaporation source with a shaped nozzle

Coating processes – Electrical product produced – Integrated circuit – printed circuit – or circuit board
Patent

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Semiconductor manufacturing apparatus

Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – With microwave gas energizing means
Patent

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Thin film deposition apparatus

Coating apparatus – Gas or vapor deposition – With treating means
Patent

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Profile ID: LFUS-PAI-P-565482

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