Evaporation source with a shaped nozzle

Details Evaporation source with a shaped nozzle Evaporation source with a shaped nozzle

1987-02-13

1989-03-14

Morgenstern, Norman

Coating processes

Electrical product produced

Integrated circuit, printed circuit, or circuit board

118726, 118624, 118627, B05D 306, B05B 502, C23C 1600

Patent

active

048123269

ABSTRACT:
An evaporation source in which an evaporation material is vaporized and jetted through a nozzle having a gradually opening cross-section, whereby the size of atom clusters of the jetted vapor can be controlled.

REFERENCES:
patent: 3245895 (1966-03-01), Baker et al.
patent: 3281517 (1966-10-01), Hemmer et al.
patent: 4152478 (1979-05-01), Takagi
patent: 4354909 (1982-10-01), Takagi et al.
patent: 4394210 (1983-07-01), Morimoto et al.
patent: 4451499 (1984-05-01), Morimoto et al.
patent: 4484943 (1984-11-01), Miura et al.
patent: 4559096 (1985-12-01), Friedman et al.
patent: 4622236 (1986-11-01), Morimoto et al.

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