4. Optics: measuring and testing
  5. Inspection of flaws or impurities
  6. Surface condition

Henricus Petrus Maria Pellemans

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Inspection method and apparatus lithographic apparatus,...

Optics: measuring and testing – Inspection of flaws or impurities – Surface condition
Reexamination Certificate

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Lithographic apparatus with alignment subsystem, device...

Photocopying – Projection printing and copying cameras – Step and repeat
Reexamination Certificate

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Lithographic apparatus with alignment subsystem, device...

Photocopying – Projection printing and copying cameras – Illumination systems or details
Reexamination Certificate

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Lithographic apparatus, alignment system, and device...

Photocopying – Projection printing and copying cameras – Focus or magnification control
Reexamination Certificate

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Method and apparatus for angular-resolved spectroscopic...

Optics: measuring and testing – By light interference – Spectroscopy
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Profile ID: LFUS-PAI-P-2167471

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