Photocopying – Projection printing and copying cameras – Illumination systems or details
Reexamination Certificate
2006-02-21
2006-02-21
Nguyen, Henry Hung (Department: 2851)
Photocopying
Projection printing and copying cameras
Illumination systems or details
C355S053000
Reexamination Certificate
active
07002667
ABSTRACT:
A lithographic apparatus according to one embodiment of the invention includes an alignment subsystem configured to align the substrate on the substrate table relative to the patterning structure. The alignment structure comprises a non-periodic feature which may be detectable as e.g. a capture position or a check position using a reference grating in the alignment subsystem. The non-periodic feature may cause a phase effect in the detected signal of the alignment subsystem or an amplitude effect.
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Den Boef Arie Jeffrey
Dirnstorfer Ingo
Jeunink Andre Bernardus
Kruijswijk Stefan Geerte
Levasier Leon Martin
ASML Netherlands B.V.
Nguyen Henry Hung
Pillsbury Winthrop Shaw & Pittman LLP
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