Optics: measuring and testing – By light interference – Spectroscopy
Reexamination Certificate
2010-08-20
2011-11-08
Lyons, Michael A (Department: 2877)
Optics: measuring and testing
By light interference
Spectroscopy
Reexamination Certificate
active
08054467
ABSTRACT:
An apparatus and method to determine a property of a substrate by measuring, in the pupil plane of a high numerical aperture lens, an angle-resolved spectrum as a result of radiation being reflected off the substrate. The property may be angle and wavelength dependent and may include the intensity of TM- and TE-polarized radiation and their relative phase difference.
REFERENCES:
patent: 3909602 (1975-09-01), Micka
patent: 4538914 (1985-09-01), Yomoda et al.
patent: 4672196 (1987-06-01), Canino
patent: 4999014 (1991-03-01), Gold et al.
patent: 5042951 (1991-08-01), Gold et al.
patent: 5106196 (1992-04-01), Brierley
patent: 5153669 (1992-10-01), DeGroot
patent: 5166752 (1992-11-01), Spanier et al.
patent: 5192980 (1993-03-01), Dixon et al.
patent: 5218415 (1993-06-01), Kawashima
patent: 5349440 (1994-09-01), DeGroot
patent: 5412473 (1995-05-01), Rosencwaig et al.
patent: 5541731 (1996-07-01), Freedenberg et al.
patent: 5596411 (1997-01-01), Fanton et al.
patent: 5703692 (1997-12-01), McNeil et al.
patent: 5713364 (1998-02-01), DeBaryshe et al.
patent: 5747813 (1998-05-01), Norton et al.
patent: 5771094 (1998-06-01), Carter et al.
patent: 5877859 (1999-03-01), Aspnes et al.
patent: 5880838 (1999-03-01), Marx et al.
patent: 5910842 (1999-06-01), Piwonka-Corle et al.
patent: 5963329 (1999-10-01), Conrad et al.
patent: 6122051 (2000-09-01), Ansley et al.
patent: 6177994 (2001-01-01), Watson et al.
patent: 6417916 (2002-07-01), Dengler et al.
patent: 6429930 (2002-08-01), Littau et al.
patent: 6429943 (2002-08-01), Opsal et al.
patent: 6449037 (2002-09-01), Jun et al.
patent: 6515744 (2003-02-01), Wei
patent: 6532076 (2003-03-01), Sidorowich
patent: 6606152 (2003-08-01), Littau et al.
patent: 6608690 (2003-08-01), Niu et al.
patent: 6654131 (2003-11-01), Opsal et al.
patent: 6699624 (2004-03-01), Niu et al.
patent: 6704661 (2004-03-01), Opsal et al.
patent: 6710876 (2004-03-01), Nikoonahad et al.
patent: 6721691 (2004-04-01), Bao et al.
patent: 6738138 (2004-05-01), Wei
patent: 6750968 (2004-06-01), Sandusky
patent: 6753961 (2004-06-01), Norton et al.
patent: 6762111 (2004-07-01), Fukuda
patent: 6768983 (2004-07-01), Jakatdar et al.
patent: 6772084 (2004-08-01), Bischoff et al.
patent: 6775015 (2004-08-01), Bischoff et al.
patent: 6778911 (2004-08-01), Opsal et al.
patent: 6781706 (2004-08-01), Sidorowich
patent: 6785638 (2004-08-01), Niu et al.
patent: 6791679 (2004-09-01), Englehard et al.
patent: 6804005 (2004-10-01), Bischoff et al.
patent: 6813034 (2004-11-01), Rosencwaig et al.
patent: 6819426 (2004-11-01), Sezginer et al.
patent: 6829057 (2004-12-01), Opsal et al.
patent: 6842259 (2005-01-01), Rosencwaig et al.
patent: 6856408 (2005-02-01), Raymond
patent: 6866153 (2005-03-01), Turner, Jr. et al.
patent: 6870621 (2005-03-01), Wei
patent: 6885464 (2005-04-01), Pfeiffer et al.
patent: 6886153 (2005-04-01), Bevis
patent: 6919964 (2005-07-01), Chu
patent: 6921916 (2005-07-01), Adel et al.
patent: 6928628 (2005-08-01), Seligson et al.
patent: 6931361 (2005-08-01), Opsal et al.
patent: 6947850 (2005-09-01), Opsal et al.
patent: 6949462 (2005-09-01), Yang et al.
patent: 6952261 (2005-10-01), Ebert et al.
patent: 6972852 (2005-12-01), Opsal et al.
patent: 6974962 (2005-12-01), Brill et al.
patent: 6982793 (2006-01-01), Yang et al.
patent: 6985229 (2006-01-01), Lee et al.
patent: 6987572 (2006-01-01), Lakkapragada et al.
patent: 6992764 (2006-01-01), Yang et al.
patent: 7046376 (2006-05-01), Sezginer
patent: 7061615 (2006-06-01), Lowe-Webb
patent: 7061622 (2006-06-01), Rollins et al.
patent: 7061623 (2006-06-01), Davidson
patent: 7061627 (2006-06-01), Opsal et al.
patent: 7068363 (2006-06-01), Bevis et al.
patent: 7080330 (2006-07-01), Choo et al.
patent: 7089164 (2006-08-01), Middlebrooks
patent: 7112813 (2006-09-01), Den Boef et al.
patent: 7115858 (2006-10-01), Holden et al.
patent: 7139081 (2006-11-01), De Groot
patent: 7148959 (2006-12-01), Dusa et al.
patent: 7215431 (2007-05-01), Opsal
patent: 7224456 (2007-05-01), Phan et al.
patent: 7230703 (2007-06-01), Sezginer et al.
patent: 7236244 (2007-06-01), Yang et al.
patent: 7265850 (2007-09-01), Archie et al.
patent: 7277172 (2007-10-01), Kandel et al.
patent: 7280212 (2007-10-01), Mieher et al.
patent: 7292341 (2007-11-01), Brill et al.
patent: 7298481 (2007-11-01), Mieher et al.
patent: 7301649 (2007-11-01), Fabrikant et al.
patent: 7317531 (2008-01-01), Mieher et al.
patent: 7333200 (2008-02-01), Sezginer et al.
patent: 7365858 (2008-04-01), Fang-Yen et al.
patent: 7440105 (2008-10-01), Adel et al.
patent: 7483133 (2009-01-01), Bareket et al.
patent: 7532305 (2009-05-01), Den Boef et al.
patent: 7532317 (2009-05-01), Smith et al.
patent: 7564555 (2009-07-01), Den Boef et al.
patent: 7791727 (2010-09-01), Den Boef et al.
patent: 7791732 (2010-09-01), Den Boef et al.
patent: 7869057 (2011-01-01), De Groot
patent: 2002/0018217 (2002-02-01), Weber-Grabau et al.
patent: 2002/0165636 (2002-11-01), Hasan
patent: 2002/0166982 (2002-11-01), Kataoka et al.
patent: 2002/0192577 (2002-12-01), Fay et al.
patent: 2003/0002043 (2003-01-01), Abdulhalim et al.
patent: 2003/0081216 (2003-05-01), Ebert et al.
patent: 2003/0133102 (2003-07-01), Opsal
patent: 2003/0143761 (2003-07-01), Fukuda
patent: 2003/0163295 (2003-08-01), Jakatdar et al.
patent: 2003/0225535 (2003-12-01), Doddi et al.
patent: 2004/0004726 (2004-01-01), Sezginer et al.
patent: 2004/0017574 (2004-01-01), Vuong et al.
patent: 2004/0066517 (2004-04-01), Huang et al.
patent: 2004/0070772 (2004-04-01), Shchegrov et al.
patent: 2004/0078173 (2004-04-01), Bischoff et al.
patent: 2004/0119970 (2004-06-01), Dusa et al.
patent: 2004/0129900 (2004-07-01), Den Boef et al.
patent: 2004/0133362 (2004-07-01), Barouch et al.
patent: 2004/0167754 (2004-08-01), Bischoff et al.
patent: 2004/0181768 (2004-09-01), Krukar
patent: 2004/0189993 (2004-09-01), Ebert
patent: 2004/0190008 (2004-09-01), Mieher et al.
patent: 2004/0196460 (2004-10-01), Dobschal et al.
patent: 2004/0201836 (2004-10-01), Chang et al.
patent: 2004/0223137 (2004-11-01), Littau et al.
patent: 2004/0239954 (2004-12-01), Bischoff
patent: 2004/0246476 (2004-12-01), Bevis et al.
patent: 2005/0012928 (2005-01-01), Sezginer et al.
patent: 2005/0041258 (2005-02-01), Opsal et al.
patent: 2005/0046855 (2005-03-01), Davidson
patent: 2005/0106479 (2005-05-01), Geh et al.
patent: 2005/0122516 (2005-06-01), Sezginer et al.
patent: 2005/0123844 (2005-06-01), Monshouwer
patent: 2005/0195412 (2005-09-01), Opsal
patent: 2005/0209816 (2005-09-01), Vuong et al.
patent: 2006/0007446 (2006-01-01), Boef et al.
patent: 2006/0033921 (2006-02-01), Den Boef et al.
patent: 2006/0066855 (2006-03-01), Den Boef et al.
patent: 2006/0082792 (2006-04-01), Sezginer
patent: 2006/0117293 (2006-06-01), Smith et al.
patent: 2006/0126074 (2006-06-01), Van Der Werf et al.
patent: 2006/0139592 (2006-06-01), Den Boef et al.
patent: 2006/0243912 (2006-11-01), Raymond et al.
patent: 2006/0250597 (2006-11-01), Nakajima
patent: 2007/0019171 (2007-01-01), Smith
patent: 2008/0036984 (2008-02-01), Mos et al.
patent: 2008/0043239 (2008-02-01), Boef et al.
patent: 2008/0074666 (2008-03-01), Boef et al.
patent: 2008/0144036 (2008-06-01), Schaar et al.
patent: 2008/0158564 (2008-07-01), Archie et al.
patent: 2008/0239318 (2008-10-01), Boef et al.
patent: 2008/0311344 (2008-12-01), Marie Kiers et al.
patent: 2010/0277706 (2010-11-01), Van der Schaar et al.
patent: 0 396 409 (1990-11-01), None
patent: 0 882 976 (1998-12-01), None
patent: 0 973 069 (2000-01-01), None
patent: 1 400 855 (2004-03-01), None
patent: 1-303721 (1989-12-01), None
patent: 2000-097841 (2000-04-01), None
patent: 2003-224057 (2003-08-01), None
patent: 2004-287400 (2004-10-01), None
patent: 2006-060214 (2006-03-01), None
patent: 2006-157023 (2006-06-01), None
patent: 2006-226994 (2006-08-01), None
patent: 2006-518942 (2006-08-01), None
patent: 2007-527531 (2007-09-01), None
patent: 2008-542790 (2008-11-01), None
patent: WO 95/02814 (1995-01-01), None
patent: WO 03/065119 (2003-08-01), None
patent: WO 03/075042 (2003-09-01), None
patent: WO 2004/024328 (2004-03-01), None
patent: WO 2004/053426 (2004-06-01), None
p
Bleeker Arno Jan
Den Boef Arie Jeffrey Maria
Dusa Mircea
Grouwstra Cedric Desire
Kiers Antoine Gaston Marie
ASML Netherlands B.V.
Lyons Michael A
Richey Scott
Sterne Kessler Goldstein & Fox P.L.L.C.
LandOfFree
Method and apparatus for angular-resolved spectroscopic... does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Method and apparatus for angular-resolved spectroscopic..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method and apparatus for angular-resolved spectroscopic... will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-4304405