Photocopying – Projection printing and copying cameras – Focus or magnification control
Reexamination Certificate
2005-09-22
2008-10-21
Nguyen, Hung Henry (Department: 2851)
Photocopying
Projection printing and copying cameras
Focus or magnification control
C355S052000
Reexamination Certificate
active
07440079
ABSTRACT:
A lithographic apparatus according to one embodiment includes an alignment system for aligning a substrate. The alignment system comprises an illuminator system configured to illuminate an alignment mark on the substrate with an illumination spot, the alignment mark comprising a plurality of lines and spaces. The system also includes a combiner system configured to transfer two images of the illuminated alignment mark without spatial filtering of the images, rotate the images 180° relatively to each other, and combine the two images; and a detection system configured to detect an alignment signal from the combined images and to determine a unique alignment position by selecting a specific one of extreme values in the detected alignment signal.
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Den Boef Arie Jeffrey
Jeunink Andre Bernardus
Keij Stefan Carolus Jacobus Antonius
Pellemans Henricus Petrus Maria
Setija Irwan Dani
ASML Netherlands B.V.
Nguyen Hung Henry
Pillsbury Winthrop Shaw & Pittman LLP
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