Photocopying – Projection printing and copying cameras – Step and repeat
Reexamination Certificate
2006-02-07
2006-02-07
Nguyen, Henry Hung (Department: 2851)
Photocopying
Projection printing and copying cameras
Step and repeat
C430S005000, C430S022000
Reexamination Certificate
active
06995831
ABSTRACT:
A lithographic apparatus according to one embodiment of the invention includes an alignment subsystem configured to align the substrate on the substrate table relative to the patterning structure. The alignment structure comprises a non-periodic feature which may be detectable as e.g. a capture position or a check position using a reference grating in the alignment subsystem. The non-periodic feature may cause a phase effect in the detected signal of the alignment subsystem or an amplitude effect.
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Den Boef Arie Jeffrey
Dirnstorfer Ingo
Jeunink Andre Bernardus
Kruijswijk Stefan Geerte
Levasier Leon Martin
ASML Netherlands B.V.
Nguyen Henry Hung
Pillsbury Winthrop Shaw & Pittman LLP
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