Single-crystal, oriented-crystal, and epitaxy growth processes;
Processes of growth from liquid or supercritical state
Having pulling during growth
Inventor
active
Apparatus for growing silicon crystals
OISF control in czochralski-grown crystals
Oxygen precipitation control in Czochralski-grown silicon crysta
Oxygen precipitation control in czochralski-grown silicon cyrsta
Spiral heater for use in czochralski crystal pullers
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