4. Radiation imagery chemistry: process, composition, or product th
  5. Imaging affecting physical property of radiation sensitive...
  6. Making electrical device

Gilles Amblard

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Combination of non-lithographic shrink techniques and trim...

Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Making electrical device
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Method of controlling line edge roughness in resist films

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
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Non-lithographic shrink techniques for improving line edge...

Optics: measuring and testing – Dimension – Width or diameter
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Organic BARC with adjustable etch rate

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Use of base developers as immersion lithography fluid

Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Making electrical device
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Profile ID: LFUS-PAI-P-2427972

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