4. Semiconductor device manufacturing: process
  5. Chemical etching
  6. Combined with the removal of material by nonchemical means

Gerd Marxsen

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Apparatus and method for chemical mechanical polishing of a...

Abrading – Abrading process – With tool treating or forming
Reexamination Certificate

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Apparatus and method for electrochemical metal deposition

Electrolysis: processes – compositions used therein – and methods – Electrolytic coating – Involving measuring – analyzing – or testing
Reexamination Certificate

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Method and system for controlling the chemical mechanical...

Semiconductor device manufacturing: process – Including control responsive to sensed condition
Reexamination Certificate

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Method and system for controlling the chemical mechanical...

Abrading – Precision device or process - or with condition responsive... – Computer controlled
Reexamination Certificate

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Method and system for improving the manufacturing of metal...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
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Profile ID: LFUS-PAI-P-2115920

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