Method and system for controlling the chemical mechanical...

Details Method and system for controlling the chemical mechanical... Method and system for controlling the chemical mechanical...

2005-10-25

2005-10-25

Nguyen, Dung Van (Department: 3723)

Abrading

Precision device or process - or with condition responsive...

Computer controlled

C451S008000, C451S287000

Reexamination Certificate

active

06957997

ABSTRACT:
In a system and a method according to the present invention, a sensor signal, such as a motor current signal, from a drive assembly of a pad conditioning system is used to control a CMP system to compensate for a change in the conditions of consumables, thereby enhancing process stability.

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