Semiconductor device manufacturing: process
Coating with electrically or thermally conductive material
To form ohmic contact to semiconductive material
Inventor
active
Creation of porosity in low-k films by photo-disassociation...
Interconnect structure with hard mask and low dielectric constan
Method for fabricating an interconnect structure with hard mask
VLSI fabrication processes for introducing pores into...
VLSI fabrication processes for introducing pores into...
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