4. Semiconductor device manufacturing: process
  5. Coating with electrically or thermally conductive material
  6. Insulated gate formation

Erik J Kielin

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Chemical vapor deposition of silicate high dielectric...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – Insulated gate formation
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Dual layer bottom anti-reflective coating

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
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Inductively coupled plasma powder vaporization for...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
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Interconnect structure for stacked semiconductor device

Active solid-state devices (e.g. – transistors – solid-state diode – Combined with electrical contact or lead – Chip mounted on chip
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Method for controlling transistor spacer width

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – Insulated gate formation
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