4. Semiconductor device manufacturing: process
  5. Coating of substrate containing semiconductor region or of...
  6. Insulative material deposited upon semiconductive substrate

Eric M. Lee

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Method for curing a porous low dielectric constant...

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Insulative material deposited upon semiconductive substrate
Reexamination Certificate

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Method for removing a pore-generating material from an...

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Insulative material deposited upon semiconductive substrate
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Method of integrating an air gap structure with a substrate

Semiconductor device manufacturing: process – Formation of electrically isolated lateral semiconductive... – Having air-gap dielectric
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Multi-step system and method for curing a dielectric film

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Reexamination Certificate

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Plasma-assisted vapor phase treatment of low dielectric...

Coating processes – Direct application of electrical – magnetic – wave – or... – Plasma
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Profile ID: LFUS-PAI-P-2215292

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