4. Radiation imagery chemistry: process, composition, or product th
  5. Imaging affecting physical property of radiation sensitive...
  6. Making electrical device

Eberhard Kühn

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Negative resist process with simultaneous development and...

Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Electron beam imaging
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Negative resist process with simultaneous development and...

Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Making electrical device
Reexamination Certificate

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Process for increasing the etch resistance and for reducing...

Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Forming nonplanar surface
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Process for sidewall amplification of resist structures and...

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Silicon-containing resist for photolithography

Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Radiation sensitive composition or product or process of making
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Profile ID: LFUS-PAI-P-2795762

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