4. Coating processes
  5. Coating by vapor, gas, or smoke

Easwar Srinivasan

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Method and apparatus for UV exposure of low dielectric...

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Formation of semi-insulative polycrystalline silicon
Reexamination Certificate

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Method for improving mechanical properties of low dielectric...

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Insulative material deposited upon semiconductive substrate
Reexamination Certificate

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Method to improve mechanical strength of low-k dielectric...

Semiconductor device manufacturing: process – Radiation or energy treatment modifying properties of...
Reexamination Certificate

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Method to improve mechanical strength of low-K dielectric...

Coating processes – Direct application of electrical – magnetic – wave – or... – Pretreatment of substrate or post-treatment of coated substrate
Reexamination Certificate

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Method to improve mechanical strength of low-K dielectric...

Coating processes – Direct application of electrical – magnetic – wave – or... – Pretreatment of substrate or post-treatment of coated substrate
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2253534

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